Performance Investigation of Reducing the Coverage Rate of Fan-filter Units in a TFT-LCD Cleanroom
碩士 === 國立勤益科技大學 === 冷凍空調系 === 99 === As the industry of TFT-LCD develops rapidly, processing techniques is becoming more pressing each day. Owing to the consideration for equipment expansion or the compliance of process environment with the specifications of cleanness in most of the design of plant...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75142486825127739764 |