Monolithic Accelerometer and Readout Circuit with Offset Cancellation Design
碩士 === 國立交通大學 === 電子研究所 === 99 === A monolithic accelerometer with integrated readout and sensor offset compensation circuit in mixed-signal MEMS process is proposed to extract the sensor signal and highly reject its offset. The readout circuit employs continuous time voltage sensing with chopper st...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/42261600283785116860 |