The Investigation of Polycrystalline Germanium on Insulator Based on SOI and Si Substrates
碩士 === 國立臺灣大學 === 電子工程學研究所 === 99 === Traditional silicon technology is mature and widespread in application nowadays. Therefore, silicon is the main material in semiconductor industry. But by the limit of physics, silicon technology will finally face that it cannot reduce its scale in order to purs...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/34838492259714620058 |