| Summary: | 碩士 === 國立臺北科技大學 === 材料及資源工程系研究所 === 99 === In this study, the deposition of non-hydrogenated diamond-like carbon (DLC) films by the cathodic arc deposition of the industrial production equipment. The deposition parameters of DLC thin films were undoped hydrogen conditions and changed the bias parameters. Another, the nitrogen doped parameters of DLC thin films was the same bias conditions and different flux of nitrogen gas. Discussing the DLC thin films relations with optical properties.
The negative bias was applied 100 V - 1000 V of the substrate for deposited DLC thin films. The structure and bonding of the DLC thin films was change with bias parameters. The bias parameter in 200 V was obtained the higher content of sp3 bonding of the DLC thin film. The bias conditions and structure change were not bigger effect to optical properties of DLC thin films. The transmittance was approximately 82%, and the optical band gap was 0.7 eV, the refractive index was between 2.9 and 3.1, the extinction coefficient was between 0.29 and 0.32.
The nitrogen doped DLC thin films was used different nitrogen flux. The deposition of DLC thin films were fixed in the same bias. The result showed that the different fluxes of nitrogen were leads to the structure change of the DLC thin films. The Raman analysis was show the rate decreased of sp3 bonding when the nitrogen doped in to the DLC thin film. The nitrogen doping was lead to graphitization of DLC thin films. Because the integrated intensity increased of the ID/IG ratio by the nitrogen content increased. The transmittance and optical band gap of optical properties was decreased, and the refractive index and the extinction coefficient increased when the nitrogen contents increased of the nitrogen doped DLC thin films. The transmittance ranges between 82% and 65%%, and the optical band gap ranges between 0.7 eV and 0.3 eV, the refractive index ranges between 2.9 and 3.5, the extinction coefficient ranges between 0.35 and 0.82.
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