Case Study on the Treatment of Fluoride-Containing Wastewater of Semiconductor Manufacturer Using Fluidized-Bed Crystallization Technology
碩士 === 朝陽科技大學 === 環境工程與管理系碩士班 === 100 === Abstract The fluoride-containing wastewater of the semiconductor industry is mainly produced by the frequent use of the large amount of hydrofluoric acid, organic solvents and acid in the etching and cleaning of the semiconductor manufacturing process. At pr...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83903058399229670093 |