A Study on Microstructure and Abrasive Resistance of Ti-Si-N Hard Films by Reactive Sputtering
碩士 === 國立高雄應用科技大學 === 模具工程系 === 100 === This research is to deposite TiSiN film on ASP2030 tool steel using magnetron-reactive sputtering. The TiSiN films with different ratio of Ti/Si are deposited under controlling the Ti/Si ratio of targets and input watt with the fixed gas flow and working press...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/44835703086899783682 |