Optimal processes for Sputtering of TiSiN on ASP2030 by Taguchi method
碩士 === 國立高雄應用科技大學 === 模具工程系 === 100 === The sputtering of TiSiN films on ASP2030 tool steels were undertaken based on Taguichi experimental method. The process parameters such as input watt 、deposition temperature 、gas ratio and interlayer composition were controlled to obtain the maximum hardness、t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/82361745364884133996 |