Preparation of Thin Film Solar Cells by In-line Hot Wire Chemical Vapor Deposition
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === Hot-Wire Chemical Vapor Deposition (Hot-Wire CVD) is a promising technique for deposition of amorphous and microcrystalline silicon thin films for photovoltaic applications.The main advantages of Hot-Wire CVD over PECVD , which is currently the most widesprea...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
|
Online Access: | http://ndltd.ncl.edu.tw/handle/50014481639922296296 |