Preparation of Thin Film Solar Cells by In-line Hot Wire Chemical Vapor Deposition

碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === Hot-Wire Chemical Vapor Deposition (Hot-Wire CVD) is a promising technique for deposition of amorphous and microcrystalline silicon thin films for photovoltaic applications.The main advantages of Hot-Wire CVD over PECVD , which is currently the most widesprea...

Full description

Bibliographic Details
Main Authors: Yun, Yaoting, 雲曜廷
Other Authors: Lien, Shuiyang
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/50014481639922296296