Fabrication and Characterization of the Micromachined Inductor with NiFe-AAO Nanocomposite Core

• Main Authors: Chen, Kuan-Ming, 陳冠名
• Other Authors: Cheng, Yu-Ting
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/02046679243914147697

碩士 === 國立交通大學 === 電子研究所 === 100 === This study presents the fabrication and characterization of spiral inductors which is a suspended MEMS structure with NiFe(83 at% Ni and 16 at% Fe)-AAO nanocomposite core. The NiFe nanorods with 60~70nm diameter are electorplated and isolated in AAO(Anodic Aluminum Oxide) template on a silicon substrate. For a spiral inductor with a NiFe-AAO nanocomposite core, about 14% inductance improvement can be observed up to 1 GHz for a 3.5 turn NiFe-AAO inductor, but also accompanied with ~55% Q factor reduction and the resonance frequency shifts toward a low frequency regime due to the prasitic capacitance caused by Ti seed-layer. In order to reduce the effect of Ti layer and improve the Q factor, a post-process using XeF2 is employed to remove the silicon substrate underneath the inductor isotropically and then to remove the Ti layer by wet etching process. The experimental results show that maximum Q factor can successfully be improved as good as the one with the air-core spiral inductors, and about 8 GHz increasment in self-resonane frequency can also been observed.