| Summary: | 碩士 === 國立彰化師範大學 === 機電工程學系 === 100 === With the rapid integration and development of quartz MEMS technology. Today, the market demand miniaturized with high precision quartz components. In order to overcome the quartz obstacles of miniaturization of production technology, and reached a high stability and accuracy requirements. And then develop a QMEMS process technologies, to increase production, reductions in size and reduce the process error. With the integration and rapid expand of quartz micro electro mechanical systems technology, market demands for miniaturization of quartz component with high accuracy.
In order to overcome the bottlenecks of micro-production technology by using quartz and to reach demands for high stability as well as accuracy, quartz micro electro mechanical systems technology (QMEMS) has been expanding for enhancing the quantity of production, miniaturizing the size of component, and reducing error.
Novel designs for micro-structure of miniaturized quartz resonator were proposed in this thesis. Novel miniaturized designs for quartz tuning fork with electrodes including H-shaped grooves, two parallel grooves, and stepwise grooves effectively enhance the magnitude of charges up to 9.8%, 33.4%, and 11.3%, respectively. As for quartz gyroscope, innovative designs with electrodes such as H-shaped grooves, two parallel grooves, and stepwise grooves effectively enhance the magnitude of charges up to 23.1%, 25.2%, and 25.3%, respectively.
This design which shortness the distance of electric field to generate a better piezoelectricity achieves the miniaturized resonant component being driven under low bias. The groove designs of electrode structures were applied to quartz tuning fork oscillator and quartz gyroscope. This design was simulated under piezoelectric analysis via the software CoventorWare2010.In order to improve the condition of power dissipation under harmonic resonant, notch structure design was made to let more energy to be trapped at the main vibration which leads to the enhancement of the magnitude of charges, the reduction of crystal impedance, the development of quality factor.
There’s eight mask designed for quartz manufacture. Quartz tuning fork resonator and quartz gyroscope was manufactured through QMEMS process for demonstrating the performance of resonator. The integrated electric circuit design was simulated by using HSPICE and fabricated by the chip implementation service provided from CMOS 0.35μm 2P4M process of TSMC. Quartz components and the CMOS IC chip was then packaged and measured based on machine electricity integration process.
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