Research on Novel Miniaturized QMEMS Resonators
碩士 === 國立彰化師範大學 === 機電工程學系 === 100 === With the rapid integration and development of quartz MEMS technology. Today, the market demand miniaturized with high precision quartz components. In order to overcome the quartz obstacles of miniaturization of production technology, and reached a high stabilit...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/15566065507321537884 |