Study of Inhibitor Degradation in an Alkaline-Based Post-Cu CMP Cleaning Solution
碩士 === 國立清華大學 === 化學工程學系 === 100 === The objective of our study is to investigate the influence of degradation of inhibitor employed in N28 node alkaline-based cleaning solution on the formation of copper oxide during post-Cu CMP cleaning. The effects of the pH and the inhibitor concentration of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18858044227476382188 |