Development and characterization of phase-pure CuAlO2 thin films grown on c-plane sapphire substrates prepared by using RF sputtering
博士 === 國立臺灣大學 === 物理研究所 === 100 === In this thesis, we investigate the development of phase-pure CuAlO2 film. CuAlO2 films were deposited on the c-plane sapphire substrates by radio-frequency (RF) magnetron sputtering using a CuAlO2 ceramic target at different deposition temperatures. The as-deposit...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27962619013913165715 |