Wet oxidation and etching processes applied on GaN optoelectronic devices
博士 === 國立中興大學 === 材料科學與工程學系所 === 101 === The major topics in this thesis were focused the characteristic of the fabrication and analysis about GaN-based optoelectronic devices through wet oxidation and etching process. In first part, a photoelectrichemical (PEC) wet mesa etching process was used to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72ye59 |