Study on the yield improvement of micro paddle cantilever beam fabrication
碩士 === 國立中興大學 === 精密工程學系所 === 101 === In this paper, we study on the defect root cause analysis and process defect improvement in micro paddle cantilever beam fabrication. After improvement, the yield increase from below 8% to over 50%. The wafer centering tool using on PR coating stage were desig...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48260453293270206010 |