Transient Thermolithography for Polymer Thin Film Patterning
碩士 === 國立中央大學 === 機械工程學系 === 101 === Photolithography is widely used in semiconductor industry and many micro/nano-manufacturing. Its resolution is usually limited by the wavelength of the light source. Thermal lithography use heat as the exposure source which has the possibility to generate pattern...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77667427698141567241 |