Big Semiconductor Manufacturing Data Analysis Using Cloud Technique

碩士 === 國立中山大學 === 資訊工程學系研究所 === 101 === In the semiconductor manufacturing industry, one of the key factors to improve the wafer quality is to analyze the existing logs and find out the probable causative parameters affecting the yield of wafers. Due to the huge amount of data and large amounts of p...

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Bibliographic Details
Main Authors: Ming-Chun Tsai, 蔡明純
Other Authors: Chung-Nan Lee
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/36458920854256695872