Grouping Method and Run-to-run Control for High-mix Semiconductor Manufacturing Process
博士 === 國立清華大學 === 化學工程學系 === 101 === In mixed run processes, typical in semiconductor manufacturing and other automated assembly-line type process, products with different recipe will be produced on the same tool. Product based run-to-run control can be applied to improve the process capability. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02132485521945317878 |