A study of AlCrN thin films fabricated by High power impulse magnetron sputtering
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 101 === High power impulse magnetron sputtering (HIPIMS) is a newly developed coating technology, which is characterized for its ultra-high peak current and peak power density to achieve unique thin film properties, such as high hardness, good adhesion and tribolog...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4vtbzv |