Controlling Dummy Wafers of Recycle Stations in a Semiconductor Fab
碩士 === 逢甲大學 === 工業工程與系統管理學系 === 102 === To persuade advanced products and to instantly meet the market demands are the main goals of the semiconductor manufacturers. In order to increase the yield of the products, it is crucial to attain stable process capability and to real-time monitor the product...
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| Format: | Others |
| Language: | zh-TW |
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2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20107474106281146860 |