Laser-induced backside wet cleaning and etching techniques
博士 === 華梵大學 === 機電工程學系 === 102 === The aimed of this paper is to propose the alternative techniques of laser cleaning and etching for glass substrates. Two kinds of laser cleaning techniques are proposed in this study. The first involves applying an Nd:YAG laser to the backside of the substrate whic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61761482493374135204 |