Dense Titanium Nitride Islands Coating for Surface-Enhanced Raman Scattering Substrates

• Main Authors: Cheng-Chieh Chiu, 邱政傑
• Other Authors: Shyankay Jou
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/21439349596477462752

碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 102 === This thesis studied surface-enhanced Raman scattering (SERS) substrates consisting dense arrays of titanium nitride (TiN) islands. We prepared TiN coatings on a quartz glass of 10 × 10 × 0.5 mm3 by RF magnetron sputter deposition and investigated their of extinction spectra and Raman scattering spectra. We deposited dense TiN islands using pulse RF magnetron sputter on 200 oC quartz substrate under flowing of Ar and N2 (gas ratio of 30：3.5), working pressure of 3.99 Pa (3×10–2 torr) and substrate rotation speed of 8 #/min. Controlling total sputtering time (Ttotal), pulse frequency and duty ratio could lead to nanostructure TiN islands with enhanced Raman scattering character. The experiments proved that using RF power of 80 W, pulse frequency of 1000 Hz, duty ratio of 60 % and total sputtering time of 15 min resulted in the TiN islands with better Raman scattering performance. The average sizes of the TiN islands were 13.4 ± 1.0 nm and the spacing between TiN islands was around 1.5 ± 0.3 nm. The TiN islands thin film had an extinction peak at around 497 nm, which related to surface plasmon resonance. By comparing Raman scattering intensity of the TiN islands substrate absorbed with 10-5 M rhodamine 6G (R6G) solution and that of 10-3 M R6G-absorbed reference substrate using 532 nm laser, an enhancement factor (EF) greater than 104 was obtained. In order to understand the uniformity of the TiN islands, Raman scattering spectrum was recorded from 16 different positions on a 20 × 20 × 0.5 mm3 Raman substrate. Raman scattering signal of 779 cm-1 peaks had an average EF of 43912 and standard deviation of 6972.