The Optimization and Experiment verification for Heating System in a Very-High temperature MOCVD reactor by Numerical Analysis
碩士 === 國立中央大學 === 光機電工程研究所 === 103 === A semiconductor equipment usually can be divided into five sub-systems, (a) heating system, (b) exhausting system, (c) injecting system, (d) control system and (e) vacuum chamber. Since metal organic chemical vapor deposition (MOCVD) requires a high temperature...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nx6gn7 |