Design and Implementation of 4×4 CMOS Capacitive Ultrasonic Sensors with Peak-Detection Sensing Circuits
碩士 === 國立清華大學 === 電子工程研究所 === 103 === This work presents a capacitive ultrasonic sensor chip fabricated by the 0.18-m CMOS-MEMS technology. The unique feature of this work is integrating the circuit and the sensor on the same chip, which can efficiently reduce the parasitic capacitance. The study c...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/c6awem |