The study of Ta-Zr-Cu Ternary Thin Film Metallic Glass Fabricated by Single Ta Target Sputter Method
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 103 === Ta-Zr-Cu thin film metallic glasses(TFMGs) fabricated by placing the copper(Cu) and zirconium(Zr) metal plates on the tantalum(Ta) target to single target magnetron co-sputter. The thin films’ composition can be changed by changing the metal plates’ number....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/8986ap |