Sensors made of carbon ceramic composite materials
碩士 === 國立臺北科技大學 === 機電整合研究所 === 103 === In this study, the microwave plasma beam chemical vapor deposition (Microwave Plasma Jet Chemical Vapor Deposition, MPJCVD) system can monitor gas pressure control, position temperature, microwave power, gas flow and the waveguide. Microwave plasma beam to gro...
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rnb5k9 |