A Study on Design of CMOS MEMS Paddle Cantilever Beam
碩士 === 國立中興大學 === 精密工程學系所 === 104 === In this thesis, we design a CMOS-MEMS paddle cantilever beam type pressure vacuum through CMOS-MEMS processing integration technology, which greatly reduces the size of vacuum gauge and its cost. Since the micro-fabrication process is highly compatible to genera...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92237408939970724054 |