MgNiO–based metal-semiconductor-metal ultraviolet photodetectors with aluminium nanoparticles
碩士 === 國立成功大學 === 微電子工程研究所 === 104 === In this study, the high quality MgNiO film was deposited on the quartz substrate by co-sputtering of NiO and MgO. To improve the film quality, the MgNiO film was treated by the thermal annealing method. To enhance the performance of the MgNiO-based photodetecto...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/8q79t8 |