Long-term exposure and health risk assessments of volatile organic compounds exposed to photolithography process workers in a semiconductor manufacturing factory
碩士 === 國立成功大學 === 環境醫學研究所 === 104 === The concentration of air pollutants found in the semiconductor manufacturing industry might be much lower than the occupational exposure limit, but the use of complex composition and toxic chemicals and by-products generated during process still cause many conce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nfkamx |