Safety Improvement Measures of Wet Benches in Eight-inch Wafer Fab
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 104 === Due to the process requirements, the wet bench used a lot of flammable organic solvents and using heater for heating. In addition, it also used a lot of combustible plastic materials, such as Polypropylene (PP), Polyvinyl Chloride (PVC), and etc. If the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68139536576129558481 |