Metal oxide composite thin films made by magnetron sputtering for bactericidal application
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 104 === The research focused on using RF magnetron reactive sputtering to deposit Ag-based oxide and oxide composite thin films at room temperature for the bactericidal purpose. At first stage, Ag-based oxide films were prepared with a Ag target at different argon-to...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/9r3862 |