Characterizations and analyses of the ZnO and ZnO : B grown on the (100), (111), textured silicon, and ITO glass substrates

• Main Authors: LAI,CHIUNG-TI, 賴炯杕
• Other Authors: FENG,SHIH-WEI
• Format: Others
• Language: en_US
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/92287609090414765193

碩士 === 國立高雄大學 === 應用物理學系碩士班 === 105 === First, zinc oxides (ZnO) thin films are grown on the planar (100), planar (111), and textured (100) three different silicon substrates. They are characterized and analyzed by various methods, such as cathode luminescence (CL), Raman spectroscopy, scanning electron microscope (SEM), atomic force microscope (AFM) and X-ray diffraction (XRD). The results show that ZnO grains with the (110) crystal orientation are most favored to grow on Si(100) substrates, while ZnO(002) grains for Si(111) substrates and ZnO(101) for textured Si substrates, respectively. This result is consistent with the theoretical explanations from the constrains of the lattice match between the ZnO and Si crystals. The analyses of the XRD data also show that the average grain sizes of the zinc oxides grown on the different silicon substrates decrease due to the increases of their average strains. The average size of ZnO grains on the Si(100) substrate is slightly larger than that on the (111) substrate, while both of them are much larger than the average size of ZnO grains on the textured Si substrate; whereas, the average ZnO strains on the Si(100) substrate are slightly smaller than those on the Si(111) one, while both of them are much smaller than the strains on the textured surface. These results strongly agree the measurements from the CL, Raman, SEM, and AFM as well. Second, different thickness zinc oxides (ZnO) (0.5 and 2 μm) and boron doped zinc oxides (BZO)(1, 2, and 3 μm) thin films are grown on the ITO glass substrates. They are characterized and analyzed by various methods, such as cathode luminescence (CL), Raman spectroscopy, scanning electron microscope (SEM), atomic force microscope (AFM) and X-ray diffraction (XRD). The results show that ZnO and BZO grains with the (110) crystal orientation are most favored to grow on ITO glass substrates, respectively. This result is consistent with the theoretical explanations from the constrains of the lattice match between the ZnO and ITO crystals. The analyses of the XRD data also show that the average grain sizes of different thickness ZnO and BZO grown on ITO glass substrates decrease due to the increases of their average strains. The average size of ZnO@2 grains on the ITO glass substrate is slightly larger than that on ZnO@0.5; whereas, the average ZnO strains on the ZnO@2 are slightly smaller than that on the ZnO@0.5. The transmittance spectra of ZnO@0.5 is larger than that on the ZnO@2. On the other hand, the average size of BZO3 grains on the ITO glass substrate is slightly larger than that on BZO2 grains on the ITO glass, both of them are larger than the average size of BZO1; whereas, the average BZO strains on the BZO3 are slightly smaller than that on the BZO2 while both of them are smaller than the strains on the BZO1. The average transmittance spectra of BZO1 is larger than that on the BZO2, while both of them are larger than the average transmittance spectra of BZO3. These results strongly agree the measurements from the CL, Raman, SEM, and AFM as well.