Metal Oxide Semiconductor with Wide Bandgap Applied on Deep UV Solar Blind Photodetector
碩士 === 國立成功大學 === 微電子工程研究所 === 105 === In the thesis, two metal oxide semiconductor with wide bandgap, IGO and MgInO, were applied on the fabrication of deep UV solar-blind photodetector. The thesis is classified into two part. In the first part of the experiment, the MSM structured UV photodetector...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/t2yn8g |