Fabrication of Metal-Semiconductor (MS) and Metal-Oxide-Semiconductor (MOS) Type Hydrogen Sensors Based on GaN/AlGaN Heterostructures
碩士 === 國立成功大學 === 微電子工程研究所 === 105 === In this thesis, a series of GaN/AlGaN Schottky diode based hydrogen sensors have been fabricated and studied. Pd was chosen as Schottky contacts metal to detect hydrogen gas. Hydrogen sensing behaviors of the studied devices are investigated by sensing response...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/a6m6z7 |