Study on Fabrication of MEMS Cantilevers for Photoacoustic Spectroscopy Gas Sensors
碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === In this study, micro-electromechanical system (MEMS) cantilevers for the photoacoustic spectroscopy (PAS) gas sensing applications were designed and fabricated. The cantilevers were fabricated on a silicon-on-insulator (SOI) wafer with the buried oxide layer...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3c579a |