Two-Product Mixed-Run Run-to-Run Control for Drifted Process
碩士 === 國立清華大學 === 統計學研究所 === 105 === Exponentially weighted moving average (EWMA) feedback controller has been widely used in semiconductor manufacturing processes. The long-term stability and short-term performance of EWMA control scheme have been addressed by several studies in the literatures. Mo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9zev4m |