| Summary: | 碩士 === 中原大學 === 工業與系統工程研究所 === 106 === This study investigates scheduling problem related to machine eligibility and chamber constraints on a parallel machine, and discusses the scheduling of etching process technology in the semiconductor industry. The number of machines and that of jobs under investigation are m and n respectively. Each job can only be processed on a specific machine and only on the chamber of the specific machine. The processing time of the job is known. When the job starts to work, it is not allowed to be intercepted. Each job is allocated to one machine. Each machine contains 3-4 chambers. When jobs are placed in the chamber of the machine, their processing time will be evenly distributed to each chamber of the machine .The job completion time of the chamber on each machine will be calculated. The goal is to minimize the makespan.
Because this problem is the NP-hard problem, for the small-scale problem, this study proposes an integer programming model to find the best solution. Compared with the approximate solution obtained by the heuristic algorithm, the results show that compared with the optimal solution, the average deviation is 3.64%, which is shorter than the solution time of the mathematical programming model. For large-scale problems, the heuristic algorithm has a solution better than the Largest Processing Time(LPT). The average improvement rate is 4.61%.
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