Minimizing the total completion time of parallel machines with machine and chamber eligibilities

• Main Authors: SSU-MIN CHANG, 張斯閔
• Other Authors: Ling-Huey Su
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/wp829s

碩士 === 中原大學 === 工業與系統工程研究所 === 106 === The goal of this study is to consider the scheduling problem of minimizing the total completion time of machine eligibility and chamber eligibility of parallel machine. This study is aimed to investigate the etch process in semiconductors.Suppose that there are N number of work pieces, and M number of machines. A certain work piece can only be used in a specific machine and specific chambers. Furthermore, it can only select one certain machine in a specific machine. A certain machine has 3 or 4 chambers. After the selection, this certain work piece would be processed in all the specific chambers in the certain machine, and the processing time would be evenly distributed into the specific chamber in this certain machine. This problem belongs to the NP-hard problem.There are three kinds of algorithms implemented in this study, including Integer Programming Model Algorithm, SPT Rule and Heuristic Algorithm. The study used the small-scale questions to compare the best solution found in Integer Programming Model Algorithm with the one in Heuristic Algorithm. On the other hand, the study used the big-scale questions to compare the best solution in SPT and Heuristic Algorithm.