Material Properties of Y2O3 , YF3 and YOF Coatings for Anti-Plasma Erosion Applications
博士 === 國立中興大學 === 材料科學與工程學系所 === 106 === This study prepared yttrium oxide (Y2O3), Yttrium fluoride (YF3) and yttrium oxyfluoride (YOF)-based anti-plasma etching coatings using the atmospheric plasma spraying method, and investigated the mechanical properties of various coatings and their chemical r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9gdvaz |