| Summary: | 碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 106 === In recent years, semiconductor industry is developing rapidly. With the advance of technology and production, the demand of chemical gas and solution is also increasing. So it is very important to transport and store these chemical materials. Besides, another import goal of every semiconductor factory is how to control the damage and avoid industrial accident in case of natural disasters. The Facility Monitoring Control System (FMCS) can help us achieve the goal. At first, this study explored the disadvantages of the current FMCS, and then surveyed the demand of factory staff members. After that, a new FMCS was developed to remedy the disadvantages and improve efficiency of current system. Finally, the Failure Mode and Effects Analysis (FMEA) was adopted to improve the reliability and reduce the operating risk.
The results show that the new FMCS can eliminate the disadvantages of the current FMCS successfully. Original FMCS exhibits high risk coefficient and the Risk Priority Number (RPN) up to 540 in the FMEA table. The RPN is reduced to 24 by using the new FMCS. That is, the risk coefficient is decreased substantially. The FMEA of the new FMCS is able to identify the ignored failure mode successfully. Therefore the stability and reliability of new FMCS are improved so that all RPNs are blow 50. There are no obvious risk coefficients exist in the new FMCS.
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