N+/P Hybrid Poly-Si Shell Structure Junctionless Field-Effect Transistors by Electron Beam Lithography Dosage Adjusted Mask Method

碩士 === 國立清華大學 === 工程與系統科學系 === 106

Bibliographic Details
Main Authors: Chiang, Ya-Ying, 江亞穎
Other Authors: Wu, Yung-Chun
Format: Others
Language:en_US
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/m8wxes