Influence of Cp2Mg flow rate on the structural,electrical,and optical properties of p-type GaN

碩士 === 國立交通大學 === 電子物理系所 === 107 === In this thesis, the metal organic chemical vapor deposition system (MOCVD) is used to grow P-type gallium nitride on the Si (111) substrate by modulating the flow of Cp2Mg. Investigate its optical, structural, and electrical properties to explore the performance...

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Bibliographic Details
Main Authors: Yen, Sui-An, 顏穗安
Other Authors: Chou, Wu-Ching
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/etu43c