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碩士 === 國立中央大學 === 化學工程與材料工程學系 === 107 === In this study, we demonstrate a novel approach combining the polystyrene nanosphere lithography and metal-assisted catalyzed etching process to successfully fabricate large-area, well-order arrays of vertically-aligned silicon nanotubes on (001)Si substrates...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f5tkrq |