Consistency Analysis of Randomness Test for Rotating and Flipping Wafer Maps

碩士 === 國立中央大學 === 電機工程學系 === 107 === ABSTRACT In this paper, we recalculate the characteristic parameters of wafer maps in different orientations for the classified wafer maps in previous research. We analyze the difference between new parameters and original wafer parameters, and what effect does i...

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Bibliographic Details
Main Authors: Hao-Kuang Hu, 胡濠鑛
Other Authors: 陳竹一
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/ee3r5w