Development of the system for Determining the Thermal Expansion Coefficient of Thin Film
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 107 === The coefficient of thermal expansion (CTE) is the important thermal property that affects the performance of thin film components. Therefore, this study establishes a detection system for extracting the CTE which is using the electro-signal as the extractin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ja4d8a |