Applications and computational fluid dynamics study of supercritical fluid processes
The development of microelectronics, optoelectronics and data storage requires new thin solid film deposition techniques, which could fulfill the requirement of conformal coverage on complex surfaces. Supercritical Fluid Deposition (SFD) is a process that combines the advantages of gas-phase and liq...
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| Language: | ENG |
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ScholarWorks@UMass Amherst
2006
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| Online Access: | https://scholarworks.umass.edu/dissertations/AAI3212752 |