Investigation of Metal-assisted Si Etching for Fabrication of Nanoimprint Lithography Stamps
This diploma thesis deals with the investigation of the metal-assisted catalytic etching (MaCE) of Si. One of the main goals is to study fabrication of stamps for nanoimprint lithography using MaCE. Formation of nanoporous silicon (PSi), Si nanowires (SiNWs) and three-dimensional nanostructures in S...
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| Format: | Others |
| Language: | English |
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Högskolan i Halmstad, Sektionen för Informationsvetenskap, Data– och Elektroteknik (IDE)
2010
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:hh:diva-14459 |