Off-normal Film Growth by High Power Impulse Magnetron Sputtering
In this study we contribute towards establishing the process-microstructure relationships in thin films grown off-normally by ionized physical vapor deposition. High power impulse magnetron sputtering (HiPIMS) is used at various peak target powers and deposition rates to grow copper (Cu) and chromiu...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2011
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-71315 |