Evaluation and extension of threaded control for high-mix semiconductor manufacturing
In the recent years threaded run-to-run (RtR) control algorithms have experienced drawbacks under certain circumstances, one such trait is when applied to high-mix of products such as in Application Specific Integrated Circuits (ASIC) foundries. The variations in the process are a function of the pr...
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| Format: | Others |
| Language: | English |
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2011
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| Online Access: | http://hdl.handle.net/2152/ETD-UT-2010-12-2097 |