Small-angle scatter measurement.
The design, analysis, and performance of a small-angle scatterometer are presented. The effects of the diffraction background, geometrical aberrations and system scatter at the small-angles are separated. Graphs are provided that quantify their contribution. The far-field irradiance distributions of...
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| Language: | en |
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The University of Arizona.
1989
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| Online Access: | http://hdl.handle.net/10150/184794 |